Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-27T01:56:00.174Z Has data issue: false hasContentIssue false
  • English
  • Français

The Development of Anodic Aluminum Oxide Based Micro-channel Plate for Large-area Photo-detector

Published online by Cambridge University Press:  03 March 2011

Seon Woo Lee ,
Qing Peng ,
Anil U. Mane ,
Jeffrey W. Elam ,
Karen Byrum ,
Henry Frisch  and
Hau Wang
Seon Woo Lee
Affiliation:
High Energy Physics Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Qing Peng
Affiliation:
Energy Systems Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Anil U. Mane
Affiliation:
Energy Systems Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Jeffrey W. Elam
Affiliation:
Energy Systems Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Karen Byrum
Affiliation:
High Energy Physics Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Henry Frisch
Affiliation:
High Energy Physics Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A. High Energy Physics, Enrico Fermi Institute, University of Chicago, Chicago, IL, 60637, U.S.A.
Hau Wang
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL, 60439, U.S.A.
Get access

Abstract

Anodized Aluminum Oxide (AAO) based micro-channel plates (MCP) are fabricated in order to develop economical large-area photodetectors. Commercially available glass capillary array has a limitation to reach channel diameter below ~10 microns. However, smaller channel diameter is desired for better spatial and fast timing resolution. AAO based MCP is a good candidate to produce channel diameter less than 10 um by taking advantage of the nano-scale intrinsic pores during etching process. In this study, various channel diameters are fabricated with use of lithographic patterning techniques and wet etching; and characterized with optical, atomic force, and scanning electron microscopies. The channel diameter, channel length and related aspect ratio, as well as the open area are varied in order to maximize the MCP photon amplification.

Keywords

devicesscanning electron microscopy (SEM)electrochemical synthesis
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011 , mrsf10-1303-y13-35
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Kapusta, M., Lavoute, P., Lherbet, F., et al. ., 2007 IEEE Nuclear Science Symposium Conference Record, 73 (2007)Google Scholar
2. Chen, X. B. and Mao, S. S., Journal of Nanoscience and Nanotechnology 6, 906 (2006).Google Scholar
3. Takaoka, G. H., Nose, T., and Kawashita, M., Vacuum 83, 679 (2008).Google Scholar
4. Chang, B. K., Liu, W. L., Fu, R. G., et al. ., Apoc 2001: Asia-Pacific Optical and Wireless Communications: Optoelectronics, Materials, and Devices for Communications 4580, 632 (2001).Google Scholar
5. Wu, J. X., Ma, M. S., Zhu, J. S., et al. ., Applied Surface Science 173, 8 (2001).Google Scholar
6. Won, S., Go, S., Lee, W., et al. ., Metals and Materials International 14, 759 (2008).Google Scholar
7. Laprade, B. and Starcher, R., 2001, BURLE Electro-optics, Inc., http://www.photonis.com/upload/industryscience/pdf/tof/2micron2.pdf Google Scholar
8. Lee, P. S., Lee, J., Shin, N., Lee, K. H., Lee, D., Jeon, S., Choi, D., Hwang, W. and Park, H., Adv. Mater. 20, 1732–1737 (2008)Google Scholar
9. Li, A. P., Muller, F., Birner, A., Nielsch, K., Gosele, U., Adv. Mater. 11, 483–487 (1999)Google Scholar
10. Walner, E., Helghts, S., Rose, S. et al. ., Patent 3626233, H01j 43/06, 43/22, USA.Google Scholar
11. Govyadinov, A., Emeliantchik, I., Kurililin, A., Nucl. Instr. and Meth. in Phys. Res. A, 419, 667–675 (1998)Google Scholar
12. Drobychev, G., Barysevich, A., Delendik, K., Nedelec, P., Sillou, D., Voitik, O., Nucl Instrum Meth A, 610, 246–248 (2009)Google Scholar
13. Elam, J. W., Routkevitch, D., Mardilovich, P. P., and George, S. M., Chem. Mater. 15, 3507–3517 (2003)Google Scholar