Published online by Cambridge University Press: 17 March 2011
AlN is a very promising deep UV sensing material suitable for space application such as exoatomospheric solar blind detectors due to its large band gap (6.2 eV), excellent radiation and thermal stability. In this paper, a deep UV detector based on AlN photoconductor was successfully grown and characterized. High quality AlN thin films on Sapphire have been confirmed by in-stu RHEED and X-ray diffraction measurements. The film has an optical Eg of 5.96 eV. The detector has extremely low dark current. Different electrodes were investigated as contact materials. Al and Pt are more suitable electrode contacts for AlN photoconductor compared to Ti. The DC responsivity of the detector starts to rise for photon energies of about 255 nm (4.9eV) and reaches its maximum 7×10-5 A/W at 195 nm (6.5eV).