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The Development of Alternative Molds for Micromolding

Published online by Cambridge University Press:  11 February 2011

Terry Garino ,
Joseph Cesarano  and
Alfredo Morales
Terry Garino
Affiliation:
Ceramic Materials Department, Sandia National Laboratories, Albuquerque, NM 87185–1411, U.S.A.
Joseph Cesarano
Affiliation:
Ceramic Materials Department, Sandia National Laboratories, Albuquerque, NM 87185–1411, U.S.A.
Alfredo Morales
Affiliation:
Microsystems Processing Department, Sandia National Laboratories, Livermore, CA 94550, U.S.A.
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Abstract

Micromolding is a recently developed technique for fabricating parts in the millimeter size range with minimum features and dimensional tolerances less than 10 μm. This degree of precision is achieved by fabricating a master using the LiGA process. The molds made from the master are then filled with powder of the desired material to form parts that are then released from the mold and sintered to high density. Currently, molds are made of either poly(methyl)methacrylate (PMMA) or poly(dimethylsiloxane) (silicone rubber, PDMS). The PMMA molds must be dissolved to release the parts using a solvent that limits the choice of binder used to hold together the powder in the part. The PDMS molds are soft and therefore not suitable for lapping the parts prior to removal from the mold. Recently, two new types of molds materials have been investigated that can be removed utilizing a phase change, either melting or sublimation. The development of these new mold materials, which allow a wider choice of binders, will be described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J10.2
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Garino, T.J., Morales, A., Buchheit, T. and Boyce, B., pp. 147–154 in Materials Science of Microelectromechanical Systems (MEMS) Devices IV, edited by Ayon, A.A., Spearing, S.M., Buchheit, T., Kahn, H., (Mater. Res. Soc. Proc. 687, Pittsburgh, PA, 2002).Google Scholar
2. Bauer, W., Ritzhaupt-Kleissl, H.-J. and Hausselt, J., “Micropatterning of Ceramics by Slip Pressing,” Ceramics International, 25 201–205 (1999).Google Scholar
3. Ritzhaupt-Kleissl, H.-J., Bauer, W., Gunther, E, Laubersheimer, J. and Hausselt, J., “Development of Ceramic Microstructures,” Microsystem Technologies, 2 130–134 (1996).Google Scholar
4. Ruprecht, R., Gietzelt, T., Muller, K., Piotter, V. and Hausselt, J., “Injection Molding of Microstructured Components from Plastics, Metals and Ceramics,” Microsystems Technologies, 8 351–358 (2002).Google Scholar
5. Freimuth, H., Hessel, V., Kölle, H., Lacher, M. and Ehrfeld, W., “Formation of Complex Ceramic Miniaturized Structures by Pyrolysis of Poly(vinylsilazane),” J. Am. Ceram. Soc., 79 1457–1465 (1996).Google Scholar
6. Sofie, S. W. and Dogan, F.. “Freeze Casting of Aqueous Alumina Slurries with Glycerol,” J. of the Am‥Cer. Soc., 84 [7] 1459–1464 2001.Google Scholar
7. ASM Handbook Volume 3: Alloy Phase Diagrams, ed. by Baker, H., p. 2.45, ASM International, Materials Park, Ohio, USA.Google Scholar