Article contents
Determination of Eigenstresses from Curvature Data
Published online by Cambridge University Press: 15 February 2011
Abstract
Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992
References
REFERENCES
- 2
- Cited by