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Design and Properties of a Thin-Film, Mems-Based Magnetostrictive Magnetometer

Published online by Cambridge University Press:  15 February 2011

T. J. Kistenmacher ,
R. Osiander ,
S. A. Ecelberger ,
R. B. Givens ,
D. K. Wickenden  and
J. C. Murphy
T. J. Kistenmacher
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
R. Osiander
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
S. A. Ecelberger
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
R. B. Givens
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
D. K. Wickenden
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
J. C. Murphy
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
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Abstract

The principles of operation of a MEMS-based magnetometer designed on the magnetoelastic effect are described. The active transduction element is a commercial (001) silicon microcantilever sputter coated with an amorphous thin film of the giant magnetostrictive alloy Terfenol-D [(Dy0.7Tb0.3)Fe2]. The easy axis of magnetization of the Terfenol-D film lies in the plane of the microcantilever and along the acicular direction. In addition to the magnetostrictive transducer, basic components include: (a) mechanical resonance of the coated-microcantilever through coupling to an ac magnetic field; and, (b) detection by optical beam deflection of the microcantilever motion utilizing a laser diode source and a position-sensitive detector. The sensitivity of this magnetostrictive magnetometer is currently 1 μT, which is three orders of magnitude better than a magnetometer based on a similar-sized piezoresistive cantilever.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 75
Copyright
Copyright © Materials Research Society 1997

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References

[1] Givens, R. B., Murphy, J. C., Osiander, R., Kistenmacher, T. J., and Wickenden, D. K., Appl. Phys. Lett. 69, 2755 (1996)Google Scholar
[2] Osiander, R., Ecelberger, S. A., Givens, R. B., Wickenden, D. K., Murphy, J. C., and Kistenmacher, T. J., Appl. Phys. Lett. 69, 2930 (1996)Google Scholar
[3] See, for example, Clark, A. E., in Ferromagnetic Materials, edited by Wohlfahrt, E. P. (North-Holland, Amsterdam, 1980), p. 531; R. D. Greenough, M. P. Schultz, A. G. I. Jenner, and A. J. Wilkinson, IEEE Trans. Magn. 27, 5346 (1991); J. M. Vranish, D. P. Naik, J. B. Resteroff, and J. P. Teter, p. 5355; R. Chung, R. Weber, and D. C. Jiles, p. 5358.Google Scholar
[4] See, for example: Mermelstein, M. D. and Dandridge, A., Appl. Phys. Lett. 51, 545 (1987).Google Scholar
[5] See, for example: Honda, T., Arai, K. I., and Yamaguchi, M., J. Appl. Phys. 76, 6994 (1994); E. Quant, B. Gerlach, and K. Seeman, J. Appl. Phys. ,p. 7000.Google Scholar
[6] Schatz, F., Hirscher, M., Schnell, M., Flik, G., and Kronmuller, H., J. Appl. Phys. 76, 5380 (1994).Google Scholar
[7] Rossel, C., Bauer, P., Zech, D., Hofer, J., Willemin, M., and Keller, H., J. Appl. Phys. 79,Google Scholar