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Deposition of Dlc Via Intense Ion Beam Ablation

Published online by Cambridge University Press:  22 February 2011

Gregory P. Johnston ,
Prabhat Tiwari ,
Donald J. Rej ,
Harold A. Davis ,
William J. Waganaar ,
Ross E. Muenchausen ,
David Tallant ,
Regina L. Simpson ,
David B. Williams  and
Xiamei Qui
Gregory P. Johnston
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545 Department of Chemical Engineering, University of New Mexico/Center for Micro-Engineered Ceramics, Albuquerque, New Mexico 87131
Prabhat Tiwari
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Donald J. Rej
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Harold A. Davis
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
William J. Waganaar
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Ross E. Muenchausen
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
David Tallant
Affiliation:
Sandia National Laboratory P. O. Box 5800, Albuquerque, New Mexico 87185-0343
Regina L. Simpson
Affiliation:
Sandia National Laboratory P. O. Box 5800, Albuquerque, New Mexico 87185-0343
David B. Williams
Affiliation:
Department of Metallurgy & Materials Engineering, Lehigh University, Bethlehem, Pennsylvania, 18015-3195
Xiamei Qui
Affiliation:
Department of Chemical Engineering, University of New Mexico/Center for Micro-Engineered Ceramics, Albuquerque, New Mexico 87131
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Abstract

Diamond-like carbon films were prepared by high intensity pulsed ion beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns pulse width beam, consisting primarily of carbon ions and protons, was focused onto a graphite target at a fluence of 15-45 J/cm2. Films were deposited onto substrates positioned in an angular array from normal to the target to 90° off normal. Deposition rates up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/sec, have been observed. Electrical resistivities between 1 and 1000 ohm·cm were measured for these films. XRD scans showed that no crystalline structure developed in the films. SEM revealed that the bulk of the films contain material with feature sizes on the order of 100 nm, but micron size particles were deposited as well. Both Raman and electron energy loss spectroscopy indicated significant amounts of sp3 bonded carbon present in most of the films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 893
Copyright
Copyright © Materials Research Society 1994

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