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Deposition of Crack-Free BaTiO3 and Pb(Zr,Ti)O3 Films Over 1 μm Thick Via Single-Step Dip-Coating

Published online by Cambridge University Press:  10 February 2011

H. Kozuka ,
M. Kajimura ,
K. Katayama ,
Y. Isota  and
T. Hirano
H. Kozuka
Affiliation:
MSE Department, Kansai University, Suita 564-8680, [email protected]
M. Kajimura
Affiliation:
MSE Department, Kansai University, Suita 564-8680, Japan
K. Katayama
Affiliation:
MSE Department, Kansai University, Suita 564-8680, Japan
Y. Isota
Affiliation:
MSE Department, Kansai University, Suita 564-8680, Japan
T. Hirano
Affiliation:
MSE Department, Kansai University, Suita 564-8680, Japan
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Abstract

BaTiO3 and PZT films were prepared by single-step dip-coating from alkoxide-acetate solutions containing polyvinylpyrrolidone (PVP). Crack-free BaTiO3 and PZT films over 1 μm in thickness were obtained via single-step deposition. Stepwise heating of the gel films was found to improve densification of BaTiO3 films, reducing the thickness and increasing the optical transmittance, which was not, however, the case with PZT films, where the stepwise heating rather induced crack formation, leading to degraded transmittance. Residual stress was evaluated on spin-coating BaTiO3 films by measuring the substrate curvature, where a significant reduction in tensile stress was found to be caused by PVP.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 606: Symposium NN – Chemical Processing of Dielectrics, Insulators & Electronic Ceramics , 1999 , 187
Copyright
Copyright © Materials Research Society 2000

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