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Deposition and Properties of Diamond-Like Carbons

Published online by Cambridge University Press:  10 February 2011

J Robertson
J Robertson*
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 IPZ, UK, [email protected]
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Abstract

We review for diamond-like carbon the various deposition methods, the deposition mechanisms of subplantation and ion-assisted addition, the characterisation methods such as Raman and electron energy loss spectroscopy, its mechanical properties and some applications as a coating material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 291
Copyright
Copyright © Materials Research Society 1999

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References

1. Robertson, J, Surftce Coating Technol 50 185 (1992)Google Scholar
2. McKenzie, D R, Rep Prog Phys 59 1611 (1996)Google Scholar
3. Lifshitz, Y, Kasi, S R, Rabalais, J W, Phys Rev Lett 68 620 (1989)Google Scholar
4. Lifshitz, Y, Lempert, G D, Grossman, E, Phys Rev Lett 72 2753 (1994)Google Scholar
5. Lifhhitz, Y, Diamond Related Mats 5 388 (1996)Google Scholar
6. Voevodin, A A, Donley, M S, Surface Coating Technol 82 199 (1995); V I Merkulov et al, App Phys Lent 73 2591 (1998)Google Scholar
7. Brown, I G, Ann Rev Mat Sci 28 243 (1998)Google Scholar
8. Anders, S, Anders, A, Brown, I G, J App Phys 74 4239 (1993)Google Scholar
9. Anders, S, Anders, A, Dickinson, M R, MacGill, R A, Brown, I G, IEEE Trans Plasma Sci 25 670 (1997)Google Scholar
10. Hirvonen, J P, Koskinen, J, Kaukonen, M, Nieminen, R, J App Phys 81 7248 (1997)Google Scholar
11. Scheibe, H J, Sienmroth, P, IEEE Trans Plasma Sci 18 117 (1990)Google Scholar
12. Cho, N H, et al, JMater Res 5 2543 (1990)Google Scholar
13. Schwan, J, Ulrich, S, Roth, H, Ehrhardt, H, Silva, S R P, Robertson, J, Samlenski, R, J App Phys 79 1416 (1996)Google Scholar
14. Koidl, P et al, Mat Sci Forum 52 41 (1990)Google Scholar
15. Weiler, M, Sattel, S, Giessen, T, Jung, K, Ehrhardt, H, Robertson, J, Phys Rev B 53 1594 (1996)Google Scholar
16. Fallon, P J, Veerasamy, V. S., Davis, C. A., Robertson, J., Amaratunga, G. A. J., Milne, W. I and Koskinen, J., Phys. Rev. B 48 4777 (1993)Google Scholar
17. Chhowalla, M, Robertson, J, Chen, C W, Silva, S R P, Amaratunga, G A J, J App Phys 81 139 (1997)Google Scholar
18. Shi, X, Tay, B K, Tan, H S, Li, Z, Tu, Y Q, Silva, S, Milne, W I, J App Phys 79 7239 (1996)Google Scholar
19. Siegal, M P, Barbour, J C, Provencio, P N, Tallant, D R, Friedmann, T A, App Phys Lett 73 759 (1998)Google Scholar
20. Tamor, M A, Vassell, W C, Carduner, K R, App Phys Lett 58 592 (1992)Google Scholar
21. Tamor, M A, Vassell, W. C., J. Appl. Phys. 76 3823 (1994)Google Scholar
22. Sattel, S, Robertson, J, Ehrhardt, H, J Appl Phys 82 4566 (1997)Google Scholar
23. Xu, S, Flynn, D, Tay, B K, Prawer, S, Nugent, K W, Silva, S R P, Lifshitz, Y, Milne, W I, Phil Mag B 76 351 (1997)Google Scholar
24. Doerner, M F, White, R L, Materials Issues in Magnetic Disk Performance, MRS Bull (Sept 1996)p 28; E Grochowski, D A Thompson, IEEE Trans Mag 30 3797 (1994)Google Scholar
25. Anders, S, Brown, I G, Bogy, D, Bhatia, C S, Data Storage (Oct 1997) p31 Google Scholar
26. Weiler, M, Lang, K, Li, E, Robertson, J, App Phys Lett 72 1314 (1998)Google Scholar
27. Lieberman, M A, Litchenberg, A J, ‘Principles of plasma discharges and materials processing, (Wiley 1994)Google Scholar
28. Morrison, N A et al, to be published, Phys Stat Solidi (1998)Google Scholar
29. Robertson, J, Diamond Related Mats 3 361 (1994)Google Scholar
30. Thornton, J A, Hoffman, D. W., Thin Solid Films 171 5 (1989)Google Scholar
31. Koskinen, J, Hirvonen, J P, Keranen, J, in ‘Amorphous Carbon, state of art’ ed Silva, S R P et al (World Scientific, 1998) p46 Google Scholar
32. vonKeudell, A, Jacob, W, J App Phys 79 1092 (1996); 81 1531 (1997)Google Scholar
33. Jacob, W, Thin Solid Films 326 1 (1998)Google Scholar
34. Moller, W, JNucl Mater 162 138 (1989)Google Scholar
35. Moller, W, App Phys A 56 527 (1993); Jpn J App Phys 34 2163 (1995)Google Scholar
36. Mantzaris, N V, Goloides, E, Boudouvis, A G, Turban, G, J App Phys 79 3718 (1996)Google Scholar
37. Robertson, J, Phys Rev B 53 16302 (1996)Google Scholar
38. Prawer, S, Nugent, K. W., Lifshitz, Y., Lempert, G. D., Grossman, E., Kulik, J., Avigal, I. and Kalish, , Diamond Rel. Mater. 5 433 (1996)Google Scholar
39. Tarnor, M A, Haire, J A, Wu, C H, Hass, K C, App Phys Lett 54 123 (1989)Google Scholar
40. Marchon, B Gui, J et al, IEEE Trans Mag 33 3148 (1997)Google Scholar
41. Gilkes, K W R, Sands, H S, Batchelder, D N, Robertson, J, App Phys Lett 70 1980 (1997); G Adamopoulos, K Gilkes, J Robertson, D N Batchelder, Diamond Related Mats (1998)Google Scholar
42. Prawer, S, Nugent, K W, in ‘Amorphous Carbon, state of art’ ed Silva, S R P et al, (World Scientific, 1998) p199 Google Scholar
43. Toney, M F, Brennan, S, J App Phys 66 1861 (1989)Google Scholar
44. Libassi, A, Ferrari, A C, et al (1998)Google Scholar
45. Jiang, X, Reichelt, K, Strizker, B, J App Phys 68 1018 (1990)Google Scholar
46. Pharr, G M, Callahan, D L, McAdams, S D, Anders, S, Silva, S, Robertson, J, App Phys Lett 68 779 (1996)Google Scholar
47. Friedmann, T A, Sullivan, J P, Knapp, J A, Tallant, D R, Follstaedt, D M, Medlit, D L, Mirkarimi, P B, App Phys Lett 71 3820 (1997)Google Scholar
48. Schultrich, B, Scheibe, H J, Drescher, D, Ziegele, H, Surface Coatings Technol 98 1097 (1998)Google Scholar
49. Beghi, M G, Bottani, C E et al,. Conference on Raman (Cape Town 1998)Google Scholar
50. He, H, Thorpe, M F, Phys Rev Lett 54 2107 (1985)Google Scholar
51. Robertson, J, Phys Rev Lett 68 220 (1992)Google Scholar
52. Anders, S, Callahan, D L, Pharr, G M, Bhatia, C S, Surface Coatings Technol 94 189 (1997)Google Scholar
53. Meneve, J, Dekempeneer, E, Wagner, W, Sneets, J, Surface Coating technol 86 617 (1996)Google Scholar
54. Okuri, K, Arai, T, Surface Coating Technol 47 710 (1991)Google Scholar
55. Chhowalla, M, Yin, Y, Amaratunga, G, McKenzie, D R, App Phys Lett 69 2344 (1996)Google Scholar
56. Friedmann, T A, McCarty, K F, Barbour, J C, Siegal, M P, Dibble, D C, App Phys Lett 68 1643 (1996)Google Scholar
57. Stief, R, Schafer, J, Ristein, J, Ley, L, Beyer, W, J Non-Cryst Solids 198 636 (1996)Google Scholar
58. Amaratunga, G A J, Chhowalla, M, Kiely, C J, Alexandrou, I, Aharonov, R, Nature 383 321 (1996)Google Scholar
59. Scheibe, H J et al, presented at Diamond Films 98 (Crete)Google Scholar
60. Sjostrom, M, Stafstrom, S, Boman, M, Sundgren, J E, Phys Rev Lett 73 1336 (1995)Google Scholar
61. Grill, A, Surftce Coatings Technol 94 507 (1997)Google Scholar
62. Enke, K, Dimigen, H, Hubsch, H, App Phys Lett 36 291 (1980)Google Scholar
63. Donnet, C, LeMogne, T, Ponsonnet, L, Belin, M, Grill, A, Patel, V, Jahnes, C, Tribology Lett 4 259(1998)Google Scholar
64. Voevodin, A A, Phelps, A W, Zabinski, J S, Donley, M S, Diamond Related Mats 5 1264 (1996)Google Scholar