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The Dependence of Ion Beam Mixing on Projectile Mass*

Published online by Cambridge University Press:  25 February 2011

R. S. Averback ,
L. J. Thompson  and
L. E. Rehn
R. S. Averback
Affiliation:
Materials Science and Technology Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, U.S.A.
L. J. Thompson
Affiliation:
Materials Science and Technology Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, U.S.A.
L. E. Rehn
Affiliation:
Materials Science and Technology Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, U.S.A.
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Abstract

Ion beam mixing in Pt-Si bilayered samples was measured during irradiation with projectiles ranging in mass from 4 amu (He) to 131 amu (Xe) at 10 K, 300 K and 373 K. Using deposited damage energy as a basis for comparing the different irradiations, it was found that the beavier ions were more efficient than the lighter ones for inducing mixing. Moreover, it was observed that the mixing was essentially independent of temperature below 373 K. These results are interpreted on the basis that the mixing is caused by the stimulated motion of defects during the cooling phase of energetic cascades.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 25
Copyright
Copyright © Materials Research Society 1984

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Footnotes

*

Work supported by the U.S. Department of Energy.

References

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