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Demonstration of Improved Quantitative Mobility Spectrum Analysis (i-QMSA)

Published online by Cambridge University Press:  10 February 2011

I. Vurgaftman ,
J. R. Meyer ,
C. A. Hoffman ,
D. Redfern ,
J. Antoszewski ,
L. Faraone  and
J. R. Lindemuth
I. Vurgaftman
Affiliation:
Code 5613, Naval Research Laboratory, Washington, DC 20375
J. R. Meyer
Affiliation:
Code 5613, Naval Research Laboratory, Washington, DC 20375
C. A. Hoffman
Affiliation:
Code 5613, Naval Research Laboratory, Washington, DC 20375
D. Redfern
Affiliation:
Dept. of Electrical Engineering, University of Western Australia, Nedlands, WA 6009
J. Antoszewski
Affiliation:
Dept. of Electrical Engineering, University of Western Australia, Nedlands, WA 6009
L. Faraone
Affiliation:
Dept. of Electrical Engineering, University of Western Australia, Nedlands, WA 6009
J. R. Lindemuth
Affiliation:
Lake Shore Cryotronics, Inc., Westerville, OH
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Abstract

We discuss an improved quantitative mobility spectrum analysis (i-QMSA) of magnetic-field-dependent Hall and resistivity data, which can determine multiple electron and hole densities and mobilities. A fully automated computer implementation of i-QMSA is applied to a variety of synthetic and real data sets. The results show that the new algorithm increases the information available from a given data set and is suitable for use as a standard tool in the characterization of semiconductor materials and devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 490: Symposium Q – Semiconductor Process & Device Performance Modeling , 1997 , 245
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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