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Degradation of Fracture and Fatigue Properties of MEMS Structures Under Cyclic Loading

Published online by Cambridge University Press:  01 February 2011

Jong-Jin Kim  and
Dongil Kwon
Jong-Jin Kim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Dongil Kwon
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
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Abstract

The fracture and fatigue properties of LIGA nickel MEMS structures were evaluated by microtensile and fatigue test methods. A microtensile/fatigue device was developed and specimens with feature size ten micrometers were used. The fatigue property was derived from displacement amplitude – the number of cycles to failure curve by applying a dynamic load with a piezoelectric actuator. The tensile/fracture properties after various cyclic loading were also measured. Both fatigue and tensile test results showed a cyclic softening phenomenon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 863: Symposium B – Materials, Technology and Reliability of Advanced Interconnects , 2005 , B7.4/O11.4
Copyright
Copyright © Materials Research Society 2005

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