Published online by Cambridge University Press: 10 February 2011
Semiconducting, epitaxial SrTiO3 thin films doped with Eu3+ donors were analyzed using transient photocapacitance spectroscopy to determine the nature of the charge compensating defects. Deep level defects were detected with optical thresholds at Ec - 0.6 eV, Ec - 0.8 eV, and Ec - 2.05 eV. The level at Ec - 0.8 eV was the dominant defect in all of the films examined, with concentrations ranging from 1.6×1015 to 1.2×1017 cm−3 that increased as the square of donor concentration. The level was attributed to the strontium vacancy.