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Defect Structure Analysis of Thick Epitaxial Films with Very Large Lattice Mismatch: Ag/Si(1l1) and Ag/Si(001).

Published online by Cambridge University Press:  28 February 2011

K.-H. Park ,
G.A. Smith ,
D.C. Mckenna ,
L. Luo ,
H.-S. Jin ,
W.M. Gibson ,
K. Rajan ,
T.-M. Lu  and
G.-C. Wang
K.-H. Park
Affiliation:
Physics Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
G.A. Smith
Affiliation:
Physics Department, State University of New York, Albany, New York 12222
D.C. Mckenna
Affiliation:
Physics Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
L. Luo
Affiliation:
Physics Department, State University of New York, Albany, New York 12222
H.-S. Jin
Affiliation:
Physics Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
W.M. Gibson
Affiliation:
Physics Department, State University of New York, Albany, New York 12222
K. Rajan
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
T.-M. Lu
Affiliation:
Physics Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
G.-C. Wang
Affiliation:
Physics Department, Rensselaer Polytechnic Institute, Troy, New York 12180-3590
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Abstract

The structural perfection and defects of Ag films deposited by molecular beam epitaxy (MBE) on Si(ll1) and Si(001) substrates have been analyzed by x-ray diffraction, Rutherford Backscattering (RBS)/channeling and electron microscopy. In spite of the large lattice mismatch (∼25 %) between Ag and Si, relatively high-quality Ag single crystal films (6∼10 % surface minimum yield) were grown on both Si(111) and Si(001) substrates. The primary defects contained in the Ag/Si(111) were double-positioning twins. The quantity of twinning depends on the film thickness and the substrate condition. For both Ag/Si(111) and Ag/Si(001) epitaxial systems, a high density defect region was contained in the Ag film within ∼1000 Å of the interface. Ag films grown on misoriented Si(l11) substrates ( 4° off normal ) were misoriented by 0.5° towards the surface normal. Possible explanations of these defect formations associated with the large lattice mismatch are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 138: Symposium Q – Characterization of the Structure and Chemistry of Defects in Materials , 1988 , 545
Copyright
Copyright © Materials Research Society 1989

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