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Defect Energy Levels in HfO2, ZrO2, La2O3 and SrTiO3

Published online by Cambridge University Press:  28 July 2011

K Xiong ,
P W Peacock  and
J Robertson
K Xiong
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
P W Peacock
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
J Robertson
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
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Abstract

Defect energy levels of oxygen vacancies in various high K oxides HfO2, ZrO2, La2O3 and SrTiO3 have been calculated using methods which give the correct band gap, such as the screened exchange and weighted density approximation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 811: Symposia D/E – Integration of Advanced Micro-and Nanelectronic Devices-Critical Issues and Solutions , 2004 , D6.4
Copyright
Copyright © Materials Research Society 2004

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