Defects inside oxide ceramics of magnesium oxide (MgO) and sapphire (Al2O3) were formed using femtosecond laser irradiation. The laser irradiance in these ceramics forms various defects classified as dislocations, twins, or nano cracks near the focal point due to the increase of temperature and successive generation of shockwave within several picoseconds. The morphology of defects mainly depends on the crystal structure; dense dislocations inside MgO with a rock-salt type structure, and nanocracks, dislocations, or twins in sapphire with a corundum structure. The TEM analysis revealed that the dense dislocations formed on the two slip planes {110} to form a cross-shaped pattern when the laser beam focused on the (100) plane in MgO. In case of sapphire crystal, cracks propagated from the focal point that has an amorphous structure along R-planes {11-02}, which had the lowest fracture surface energy. The nano crack transformed into the aligned void and dislocation structure during the heat treatment over 1573K, which is one of the crack healing effect.