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The Decomposition of Methyltrichlorosilane: Studies in A High-Temperature Flow Reactor

Published online by Cambridge University Press:  22 February 2011

Mark D. Allendorf ,
Thomas H. Osterheld  and
Carl F. Melius
Mark D. Allendorf
Affiliation:
Combustion Research Facility, Mail Stop 9052, Sandia National Laboratories, Livermore, CA 94551-0969
Thomas H. Osterheld
Affiliation:
Combustion Research Facility, Mail Stop 9052, Sandia National Laboratories, Livermore, CA 94551-0969
Carl F. Melius
Affiliation:
Combustion Research Facility, Mail Stop 9052, Sandia National Laboratories, Livermore, CA 94551-0969
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Abstract

Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. The results indicate that methane and hydrogen chloride are major products of the decomposition. No chlorinated silane products were observed. Hydrogen carrier gas was found to increase the rate of MTS decomposition. The observations suggest a radical-chain mechanism for the decomposition. The implications for silicon carbide chemical vapor deposition are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 105
Copyright
Copyright © Materials Research Society 1994

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