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Decomposition and Impurity Analysis of Organotellurium Precursors for MOVPE

Published online by Cambridge University Press:  25 February 2011

J.E. Hails ,
I.R. Girling  and
D.R. Stern
J.E. Hails
Affiliation:
Royal Signals and Radar Establishment, St. Andrews Road, Malvern, Worcs., WR14 3PS, UK
I.R. Girling
Affiliation:
GEC Hirst Research Centre, East Lane, Wembley, Middlesex, UK
D.R. Stern
Affiliation:
GEC Hirst Research Centre, East Lane, Wembley, Middlesex, UK
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Abstract

This paper discusses the application of gas chromatography-mass spectroscopy (GC-MS) to the assessment of precursors for the MOVPE growth of (Hg,Cd)Te. GC-MS has been used to analyse precursors for volatile organic and organometallic impurities. An extension of the technique has also allowed precursor decomposition reactions and interactions to be studied. Information obtained on alkyl purity, decomposition and interactions has been shown to be of direct relevance to the optimisation of growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 155
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

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