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CW Laser Crystallization of Soi Thermal analysis of the most critical parameters

Published online by Cambridge University Press:  22 February 2011

J.M. Hode ,
J.P. Joly  and
P. Jeuch
J.M. Hode
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
J.P. Joly
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
P. Jeuch
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
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Abstract

We present an overview of the thermal modeling of CW laser induced crystallization of SOI. The dynamical case for a three-layer structure is derived. Effects of the phase change (increase in reflectivity, latent heat) are also treated. Analytical expressions are given and the models are compared to experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 513
Copyright
Copyright © Materials Research Society 1984

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References

REFERENCES

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