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Cu Resistivity in Narrow lines: Dedicated Experiments for Model Optimization

Published online by Cambridge University Press:  01 February 2011

Sylvain Maitrejean
Affiliation:
[email protected], CEA-LETI, D2NT LBE, 17 Rue des Martyrs, GRENOBLE, N/A, 38000, France
Roland Gers
Affiliation:
[email protected], CEA-LETI, N/A, 17, Rue des Martyrs, Grenoble, N/A, 38000, France
Thierry Mourier
Affiliation:
[email protected], CEA-LETI, N/A, 17, Rue des Martyrs, Grenoble, N/A, 38000, France
Alain Toffoli
Affiliation:
[email protected], CEA-LETI, N/A, 17, Rue des Martyrs, Grenoble, N/A, 38000, France
Gérard Passemard
Affiliation:
[email protected], STMicroelectronics, 850, rue J. Monet, Crolles, N/A, 38920, France
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Abstract

As the dimensions of interconnects shrink, the confinement effects associated with a very small grain size lead to a significant increase in the resistivity of the metal. Cu resistivity models have been proposed using the classical Fuch and Sondheimer approach for surface effect, and the Mayadas and Shatzkes approach for the grain boundary effect. In these models, three adjustable parameters must be used. Good agreement between experimental data and models can easily be obtained. However, numerous fitting parameter sets can be used with equivalent fitting quality and opposite physical meaning. In this work, experiments dedicated to model parameter extraction are proposed and released. They are based on the used of Cu lines with various line widths and heights. Classical resistivity increase with line width and line height decrease is observed. The resistivity behaviour is modelled. In this case, limited fitting parameter options are obtained. For Cu narrow lines confined with Ta, these parameters suggest maximum surface effect, medium grain boundary effect and low impurity content inside the lines.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

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References

references

1 Thomson, J.J., Proc. Camb. Phil. Soc., 11, 1200, (1901)Google Scholar
2 Hinode, K., Hanaoka, Y., Takeda, K., Kondo, S., Jpn. J. Appl. Phys., 40 10971099, (2001)Google Scholar
3 Guillaumond, J. F., Arnaud, L., Mourier, T., Fayolle, M., Pesci, O., Reimbold, G., International Interconnect Technology Conference 2002 (IITC 2002), IEEE, San Francisco, 2002, p. 132134 Google Scholar
4 Steinhogl, W., Schindler, G., Steinlesberger, G., Traving, M., Engelhardt, M., J. Appl. Phys. 97, 023706 (2005)Google Scholar
5 Rossnagel, S.M., Kuan, T.S., J. Vac. Sc. Technol. B, B22, 240, (2004),Google Scholar
6 Wu, W., Brongersma, S.H., Hove, M. Van, Maex, K., Appl. Phys. Let. 84, 28382840, (2004)Google Scholar
7 Chen, F., Gambino, J., Sullivan, T., Gill, J., Li, B., Meatyard, D., Advanced Metallization Conference 2005 (AMC 2005), MRS, Warendalle, p. 103108 Google Scholar
8 Zhang, W., Brongersma, S. H., Clarysse, T., Terzieva, V., and Rosseel, E. Vandervorst, W. and Maex, K. J. Vac. Sci. Technol. B, 22.4, 1830, (2004)Google Scholar
9 Fuchs, K., Proc. Camb. Phil. Soc., 34,100, (1938)Google Scholar
10 Sondheimer, E.H.,. Advances in Physics, 1. (1952)Google Scholar
11 Mayadas, A.F., Shatzkes, M., Physical review B, 1(4), 1382, (1970)Google Scholar
12 Sambles, J.R., Thin solid film, 106, 321331, (1983)Google Scholar
13 Zhang, W., Brongersma, S., Aelst, J. Van, Richard, O., Bamal, M., Heylen, N., Li, Y., Beyer, G., Maerx, K., K. Advanced Metallization Conference 2005 (AMC 2005), MRS, Warendalle, to be publishedGoogle Scholar
14 Joo, YC., Paik, JM., Jung, JK., MRS Spring Meeting 2005, Mater. Res. Soc. Symp. Proc. Vol. 863 (2005)Google Scholar
15 Mourier, T., Haxaire, K., Cordeau, M., Dasilva, S., Safraoui, V., Torres, J., Advanced Metallization Conference 2005 (AMC 2005), MRS, Warendalle, to be publishedGoogle Scholar
16 Zhang, W., Brongersma, S. H., Conard, T., Wu, W., Hove, M. Van, Vandervorst, W., Maex, K., ECS Letters, 8, C95C97, (2005)Google Scholar
17 Mourier, T., Maitrejean, S. To be publishedGoogle Scholar