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Cu CMP and its Challenge for 20nm Nodes and Beyond

Published online by Cambridge University Press:  30 July 2012

John H. Zhang ,
Wei-Tsu Tseng ,
Laertis Economikos ,
Qiang Fang ,
Jianping Zheng ,
Lin Yang ,
Donald F. Canaperi ,
Michael Lofaro ,
Ben Kim  and
Chao-Kun Hu
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John H. Zhang*
Affiliation:
STMicroelectronics, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Wei-Tsu Tseng
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Laertis Economikos
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Qiang Fang
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Jianping Zheng
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Lin Yang
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Donald F. Canaperi
Affiliation:
IBM at Albany Nanotech, Albany, NY 12203, USA
Michael Lofaro
Affiliation:
IBM Research, Yorktown Heights, NY 10598, USA
Ben Kim
Affiliation:
STMicroelectronics, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Chao-Kun Hu
Affiliation:
IBM Research, Yorktown Heights, NY 10598, USA
Eric G. Liniger
Affiliation:
IBM Research, Yorktown Heights, NY 10598, USA
Richard Murphy
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Tsong L. Leo Tai
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Walter Kleemeier
Affiliation:
STMicroelectronics, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Cindy Goldberg
Affiliation:
STMicroelectronics, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
Jennifer Muncy
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Xiaomeng Chen
Affiliation:
IBM Semiconductor Research and Development Center (SRDC), 2070 Route 52, Hopewell Junction, NY 12533, U.S.A
Ron Sampson
Affiliation:
STMicroelectronics, 2070 Route 52, Hopewell Junction, NY 12533, U.S.A.
*
*Email: [email protected], [email protected]
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Abstract

The challenges associated with meeting 20nm technology requirements for better Cu CMP process uniformity and lower defectivity have been studied. Required improvements in uniformity were obtained through platen process optimization along with evaluation & selection of specific Cu slurries and pads and their performance reported. The principal factors influencing defect formation, including Cu barrier metallurgy, interconnect pattern density and process queue times were studied. Specific new post CMP clean chemistries were evaluated to assess their capability to suppress defect formation and their performance reported. The trade off between uniformity and defect suppression as a function slurry, pad and post Cu CMP clean chemistry is described.

Keywords

CMPCudielectric properties
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1428: Symposium C – “Interconnect Challenges for CMOS Technology--Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking” , 2012 , mrss12-1428-c06-03
Copyright
Copyright © Materials Research Society 2012

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References

REFERENCES

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