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Crystallization of Amorphous Metastable CeramicPVD-Coatings

Published online by Cambridge University Press:  15 February 2011

O. Knotek ,
F. Löffler  and
L. Wolkers
O. Knotek
Affiliation:
Materials Science Institute, Aachen University of Technology, D-52056 Aachen, Germany
F. Löffler
Affiliation:
Materials Science Institute, Aachen University of Technology, D-52056 Aachen, Germany
L. Wolkers
Affiliation:
Materials Science Institute, Aachen University of Technology, D-52056 Aachen, Germany
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Abstract

Ceramic PVD coatings have got very often an X-ray Amorphous structure. Thisis regarded for all classes of ceramics like covalent and ionic Materials.These Amorphous materials start to crystallize at temperatures about 800 °C,a quite low temperature for the practical use of such Materials. Thisprevents the propagation of this materials in applications like hightemperature wear protection, oxidation resistivity etc.

This paper describes several possible techniques to increase the thermalstability of the Amorphous state of ceramic PVD-coatings like A1203 and SiCup to 1200 °C. The best way is the incoporation of an additional elementlike nitrogen into the thin filmsl. The change of the mechanical propertiesof alumina leads to new applications like diffusion barriers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 321: Symposium E – Crystallization and Related Phenomena in Amorphous Materials—Ceramics, Metals, Polymers, and Semiconductors , 1993 , 621
Copyright
Copyright © Materials Research Society 1994

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References

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