Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-05T08:28:44.521Z Has data issue: false hasContentIssue false
  • English
  • Français

Creation of Patterned Gold Nanostructures via Electron-Beam-Induced Deposition

Published online by Cambridge University Press:  15 May 2013

Anastasia V. Riazanova ,
Johannes J. L. Mulders  and
Lyubov M. Belova
Anastasia V. Riazanova
Affiliation:
Department of Materials Science and Engineering, KTH – Royal Institute of Technology, Brinellvägen 23, Stockholm, 100 44, Sweden.
Johannes J. L. Mulders
Affiliation:
FEI Electron Optics, Achtseweg Noord 5, Eindhoven, 5600 KA, The Netherlands.
Lyubov M. Belova
Affiliation:
Department of Materials Science and Engineering, KTH – Royal Institute of Technology, Brinellvägen 23, Stockholm, 100 44, Sweden. FEI Electron Optics, Achtseweg Noord 5, Eindhoven, 5600 KA, The Netherlands.
Get access

Abstract

One of the methods to grow nanoscale three-dimensional (3D) Au patterns is to perform local electron-beam-induced deposition (EBID) using the Me2Au(acac) precursor inside the chamber of a scanning electron microscope (SEM). However, due to the organometallic nature of the chemical, the concentration of the metallic constituent in the as-deposited structure is dramatically low, at around 10 at. % of Au. Ex-situ post-annealing of Me2Au(acac) EBIDs is a very promising purification approach, resulting in an Au content of > 92 at. % after annealing at 600 °C. However, in most of the cases it also distorts the geometrical shape of the heat-treated structure, preserving of which is essential for the application. In this paper we present a systematic study of the dependence between the annealing parameters and resulting purity in combination with the shape of the Au structure. Optimized heat treatment conditions for the creation of well-purified high aspect ratio Au pillar array are presented; and for planar continuous structures, the importance of the parameter height to area ratio is identified.

Keywords

Aunanostructurepurification
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1546: Symposium L – Nanoparticle Manufacturing, Functionalization, Assembly and Integration , 2013 , mrss13-1546-l06-35
Copyright
Copyright © Materials Research Society 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

van Dorp, W. F. and Hagen, C. W., J. Appl. Phys. 104, 081301 (2008).CrossRefGoogle Scholar
Randolph, S. J., Fowlkes, J. D. and Rack, P. D., Crit. Rev. Solid State Mater. Sci. 31, 55 (2006).CrossRefGoogle Scholar
Utke, I., Hoffman, P. and Melngailis, J., J. Vac. Sci. Technol. B 26, 1197 (2008).CrossRefGoogle Scholar
Riazanova, A. V., Rikers, Y. G. M., Mulders, J. J. L., and Belova, L. M., Langmuir 28, 6185 (2012).CrossRefGoogle Scholar
Botman, A., Mulders, J. J. L. and Hagen, C. W., Nanotechnology 20, 372001 (2009).CrossRefGoogle Scholar
Graells, S., Alcubilla, R., Badenes, G. and Quidant, R., Appl. Phys. Lett. 91, 121112 (2007).CrossRefGoogle Scholar
Revitz, M. and Turene, F. E., U.S. Patent No. 3 641 402 (8 February 1972).Google Scholar
Botman, A., Towards high purity nanostructures from electron beam induced deposition of platinum (Ph.D. Thesis, Technical University of Delft, Delft, The Netherlands, 21 December 2009), p. 76.Google Scholar
Höflich, K., Yang, R. B., Berger, A., Leuchs, G. and Christiansen, S., Adv. Mater. 23, 2657 (2011).CrossRefGoogle Scholar