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Corrosion Fatigue Tests of Micro-Sized Specimens

Published online by Cambridge University Press:  17 March 2011

Y. Mizutani ,
Y. Higo ,
Y. Ichikawa ,
A. Morita ,
K. Takashima  and
M.V. Swain
Y. Mizutani
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan, [email protected]
Y. Higo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
Y. Ichikawa
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
A. Morita
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
K. Takashima
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan
M.V. Swain
Affiliation:
Biomaterials Science Research Unit, University of Sydney, Australian Technology Park Eveleigh, NSW1490, Australia
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Abstract

Corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investigate corrosion fatigue properties of micro-sized materials. Thus, it is necessary to develop a corrosion fatigue test method for micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, a corrosion fatigue test method for micro-sized specimens has been developed and corrosion fatigue tests for micro-sized Ni-P amorphous alloy specimens have been carried out in a 0.9% NaCl solution. Specimens of cantilever-beam-type with dimensions of 10 × 12 × 50 μm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Corrosion fatigue tests on the micro-sized specimens were succeeded, and environmental effects on fatigue properties of micro-sized specimens were clearly observed. Several problems and solutions for the method were described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE5.11
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

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