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Core-shell Ge Nanoparticles on Oxide Surfaces for Enhanced Interface Stability

Published online by Cambridge University Press:  01 February 2011

Scott K. Stanley  and
John G. Ekerdt
Scott K. Stanley
Affiliation:
[email protected], University of Texas at Austin, Chemical Engineering, 1 University Station, C0400, Austin, TX, 78712, United States
John G. Ekerdt
Affiliation:
[email protected], University of Texas at Austin, Chemical Engineering, 1 University Station, C0400, Austin, TX, 78712, United States
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Abstract

Germanium nanoparticles are grown on HfO2 substrates by hot-wire chemical vapor deposition (HWCVD). The oxidation and thermal stability of these unmodified Ge nanoparticles are determined with X-ray photoelectron spectroscopy (XPS). Core-shell nanoparticles were then prepared by growing the Ge cores with HWCVD and selectively growing Si or C shell layers on the Ge cores by conventional CVD. The formation of core-shell nanoparticles was monitored with XPS and low energy ion scattering. Large differences are observed in the thermal stability and oxide formation for unmodified Ge and the different core-shell nanoparticles.

Keywords

Genucleation & growthoxidation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 933: Symposium G – Science and Technology of Nonvolatile Memories , 2006 , 0933-G02-07
Copyright
Copyright © Materials Research Society 2006

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