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Convection and Constitutional Supercooling Cells in Laser Annealed Silicon*

Published online by Cambridge University Press:  15 February 2011

J. Narayan  and
J. Fletcher
J. Narayan
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37830
J. Fletcher
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37830
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Abstract

The formation of convection and constitutional supercooling induced cells has been studied in indium implanted, laser annealed silicon using plan-view and cross-section electron microscopy. The convection cells were associated with the spatial inhomogeneity in the laser pulse, which leads to large temperature gradients in the lateral direction. The average size of constitutional supercooling cells decreases with increasing velocity of solidification, and it also decreases from (111) orientation to (100). The results of a perturbation theory will be discussed, which predicts the cell size and limiting concentration of instability as a function of velocity of solidification.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 2: Symposium – Defects in Semiconductors I , 1980 , 431
Copyright
Copyright © Materials Research Society 1981

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Footnotes

*

Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract W–7405–eng–26 with Union Carbide Corporation.

References

REFERENCES

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