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Controlled deposition of wedge-shaped profiles for thin (∼10Å) layers by pulsed laser deposition

Published online by Cambridge University Press:  01 February 2011

H.M. Christen  and
I. Ohkubo
H.M. Christen
Affiliation:
Oak Ridge National Laboratory, Condensed Matter Sciences Division, Oak Ridge, Tennessee, 37831–6056
I. Ohkubo
Affiliation:
Oak Ridge National Laboratory, Condensed Matter Sciences Division, Oak Ridge, Tennessee, 37831–6056
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Abstract

A method yielding precisely controlled thickness profiles in thin-film growth is necessary for continuous compositional spread techniques. While multiple approaches have been introduced and successfully tested, some specific applications require the use of very thin “wedge”-type profiles (∼10 Å at the thickest point), while at the same time yielding lateral sample sizes of several centimeters. Here we introduce the basic principles of a pulsed-laser deposition based approach utilizing the translation of the substrate behind a slit-shaped aperture and demonstrate by simple calculations that this method can satisfy these requirements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ8.4
Copyright
Copyright © Materials Research Society 2004

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References

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