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Confinement Effects in Nanoscale Anodic Alumina Structures on Silicon
Published online by Cambridge University Press: 01 February 2011
Abstract
Anodic aluminum oxide (AAO) has long been considered a viable material for templated growth of nanomaterials for electronic, magnetic and optical applications due to the ability to form self-organized, high aspect-ratio nanochannels. More recently these porous materials have been incorporated with silicon to create a template for nanostructured materials on a semiconducting substrate. However, there has been no investigation into how pore growth is affected by confining the pre-anodized aluminum dimensions to the nanometer scale. We have used electron beam lithography to pattern 200 nm thick aluminum structures on Si with lateral features ranging from 100 nm to several microns in size. Structures consisting of 1 – 10 individual pores 10 – 15 nm in diameter are routinely fabricated. Confinement effects in the narrowest features assist in pore ordering in the porous structures without the use of pre-patterning or a two step anodization.
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- Copyright © Materials Research Society 2005