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Concentric Metallic-Piezoelectric Microtube Arrays

Published online by Cambridge University Press:  01 February 2011

Hongjin Fan ,
S. Kawasaki ,
J. M. Gregg ,
A. Langner ,
T. Leedham  and
J. F. Scott
Hongjin Fan
Affiliation:
[email protected], University of Cambridge, Dept. of Earth Sciences, Downing St., Cambridge, CB2 3EQ, United Kingdom, 44-1223-333-408, 44-1223-333-450
S. Kawasaki
Affiliation:
[email protected], University of Cambridge, Department of Earth Sciences, Cambridge, CB2 3EQ, United Kingdom
J. M. Gregg
Affiliation:
[email protected], Centre for Nanostructured Media, Queen's University of Belfast, Belfast, BT7 1NN, United Kingdom
A. Langner
Affiliation:
[email protected], Max Planck Institute of Microstructure Physics, Halle, 06120, Germany
T. Leedham
Affiliation:
[email protected], Max Planck Institute of Microstructure Physics, Halle, 06120, Germany
J. F. Scott
Affiliation:
[email protected], University of Cambridge, Department of Earth Sciences, Cambridge, CB2 3EQ, United Kingdom
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Abstract

Trilayer concentric metallic-piezoelectric-metallic microtubes are fabricated by infiltrating porous Si templates with sol precursors. LaNiO3 (LNO) is used as the inner and outer electrode material and PbZrTiO3 (PZT) is the middle piezoelectric layer. Structure of the microtubes is characterized in details using scanning and transmission electron microscopy which are equipped with energy dispersive X-ray spectroscopy for elemental mapping. The hysteresis of a trilayered thin film structure of LNO-PZT-LNO is shown. This trilayered tubes might find applications in inkjet printing.

Keywords

microstructurepiezoelectricthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1071: Symposium F – Materials Science and Technology for Nonvolatile Memories , 2008 , 1071-F01-07
Copyright
Copyright © Materials Research Society 2008

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References

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