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Compressive Stress Accumulation in Composite Nanoporous Gold and Silicone Bilayer Membranes: Underlying Mechanisms and Remedies

Published online by Cambridge University Press:  01 February 2011

Erkin Seker ,
Ling Huang ,
Matthew R. Begley ,
Hilary Bart-Smith ,
Robert G. Kelly ,
Giovanni Zangari ,
Michael L. Reed  and
Marcel Utz
Erkin Seker
Affiliation:
[email protected], University of Virginia, Chemistry, 351 McCormick Rd., Thornton Hall C227, Charlottesville, VA, 22904, United States
Ling Huang
Affiliation:
[email protected], University of Virginia, Department of Chemistry, Charlottesville, VA, 22904, United States
Matthew R. Begley
Affiliation:
[email protected], University of Virginia, Department of Mechanical and Aerospace Engineering, Charlottesville, VA, 22904, United States
Hilary Bart-Smith
Affiliation:
[email protected], University of Virginia, Department of Mechanical and Aerospace Engineering, Charlottesville, VA, 22904, United States
Robert G. Kelly
Affiliation:
[email protected], University of Virginia, Department of Materials Science and Engineering, Charlottesville, VA, 22904, United States
Giovanni Zangari
Affiliation:
[email protected], University of Virginia, Department of Materials Science and Engineering, Charlottesville, VA, 22904, United States
Michael L. Reed
Affiliation:
[email protected], University of Virginia, Department of Electrical and Computer Engineering, Charlottesville, VA, 22904, United States
Marcel Utz
Affiliation:
[email protected], University of Virginia, Department of Mechanical and Aerospace Engineering, Charlottesville, VA, 22904, United States
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Abstract

This paper outlines a simple method to fabricate a bilayer membrane consisting of a thin nanoporous gold layer infused with uncured polydimethylsiloxane. The fabrication technique offers excellent adhesion due to mechanical interlocking between porous layer and elastomer, and excellent electrical conductivity up to 25% strain, despite a very low effective elastic modulus (∼1.35 MPa) due to cracks in the embedded gold layer. Initially freestanding circular membranes displayed significant out of plane buckling, and created difficulties in extraction of membrane mechanical properties. The underlying mechanisms of compressive stress accumulation that lead to membrane buckling and remedies to prevent it are discussed.

Keywords

compositethermal stressesbonding
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD03-20
Copyright
Copyright © Materials Research Society 2008

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