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Compositionally Asymmetric Tri-Color Superlattices Grown by Pulsed Laser Deposition
Published online by Cambridge University Press: 01 February 2011
Abstract
Compositionally asymmetric tri-color superlattices (TCS) with a combination of BaTiO3/SrTiO3/CaTiO3 have been grown by pulsed laser deposition (PLD) on atomically-flat SrRuO3-covered (001) SrTiO3 substrates. Conducting SrRuO3 films with single-terrace steps that closely mimic those of the SrTiO3 substrate also were grown by PLD and serve as bottom electrodes. In order to achieve atomic control of each layer, we have calibrated precisely the number of laser pulses required to grow one unit-cell-thick layers (∼200 for a laser spot of 0.4 mm2). These conditions allowed recording of pronounced oscillations of the reflection high-energy electron diffraction (RHEED) specular spot intensity over the entire growth run - even for TCS layers totaling more than 1000 nm in total thickness.
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- Copyright © Materials Research Society 2004