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Composite BST/MgO thin films for microwave tunable devices

Published online by Cambridge University Press:  18 March 2011

T. V. Rivkin ,
J. D. Perkins ,
P. A. Parilla ,
D. S. Ginley ,
C. M. Carlson ,
L. C. Sengupta ,
L. Chiu ,
X. Zhang ,
Y. Zhu  and
S. Sengupta
T. V. Rivkin
Affiliation:
National Renewable Energy Laboratory, Golden, CO
J. D. Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, CO
P. A. Parilla
Affiliation:
National Renewable Energy Laboratory, Golden, CO
D. S. Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, CO
C. M. Carlson
Affiliation:
Micron Technology, Inc., Boise, ID 83707-0006
L. C. Sengupta
Affiliation:
Paratek Microwave, Inc., Columbia, MD
L. Chiu
Affiliation:
Paratek Microwave, Inc., Columbia, MD
X. Zhang
Affiliation:
Paratek Microwave, Inc., Columbia, MD
Y. Zhu
Affiliation:
Paratek Microwave, Inc., Columbia, MD
S. Sengupta
Affiliation:
Paratek Microwave, Inc., Columbia, MD
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Abstract

Composite thin films of 60 wt% Ba0.6Sr0.4TiO3 and 40 wt% MgO were produced by Pulsed Laser Deposition. The biaxial texture of the BST component on the MgO substrate has been established with XRD. All as-deposited films had an enlarged BST out-of-plane lattice parameter. A more relaxed lattice constant as well as higher degree of texture has been obtained in the films deposited at higher temperature and lower deposition rate. Post-deposition annealing in flowing oxygen results in a further relaxation and alignment of the BST lattice. The as-deposited films were not tunable at room temperature. The greatest dielectric tuning was achieved in films annealed at 1200 °C. The observed difference in tunability for the films annealed at different temperatures may result from a spatial redistribution of BST material on the substrate surface during annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 656: Symposium DD – Materials Issues for Tunable RF and Microwave Devices II , 2000 , DD5.7
Copyright
Copyright © Materials Research Society 2001

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References

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