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Composite Biomolecular/Solid State Nanostructures

Published online by Cambridge University Press:  21 February 2011

Kenneth Douglas
Affiliation:
University of Colorado, Department of Physics, Boulder, Colorado 80309.
Noel A. Clark
Affiliation:
University of Colorado, Department of Physics, Boulder, Colorado 80309.
Kenneth J. Rothschild
Affiliation:
Boston University, Departments of Physics and Physiology, Boston, Massachusetts 02215.
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Extract

Parallel nanometer molecular lithography has recently been demonstrated to be a parallel fabrication process for structures with features defined by single molecules [1]. In this process two dimensional (2d) monolayer protein crystals are used as patterning elements in the parallel fabrication of structures on the 10nm length scale (nanostructures). The parallelism of this technique is in contrast to such serial fabrication methods as x-ray and electron-beam lithography.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

1. Douglas, K., Clark, N.A., and Rothschild, K.J., Appl. Phys. Lett. 48, 676 (1986).Google Scholar
2. Nermut, M.V., Trends in Biochem. Sci. 8, 303 (1983).Google Scholar
3. Rash, J.E. and Hudson, C.S. (editors), Freeze-Fracture; Methods, Artifacts and Interpretations, Raven Press, New York (1979).Google Scholar
4. Powell, R.A. (editor), Dry Etching for Microelectronics, Elsevier, Amsterdam, 1984, p. 119.Google Scholar
5. Douglas, K., Clark, N.A., and Rothschild, K.J., to appear in Applied Physics Letters.Google Scholar
6. Digital Instruments, Inc., 6780 Cortona Drive, Santa Barbara, California 93117.Google Scholar
7. Taylor, K.A., Deatherage, J.F., and Amos, L.A., Nature 299, 840 (1982).Google Scholar