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COMPENSATION OF THE INTERNAL STRESS GRADIENT IN ULTRANANOCRYSTALLINE DIAMOND FOR THE FABRICATION OF MICROACTUATORS AND TRIBOMETERS ON A CHIP

Published online by Cambridge University Press:  21 February 2013

Federico Buja ,
Ralu Divan ,
Anirudha V. Sumant ,
David Czaplewski  and
W. Merlijn van Spengen
Federico Buja
Affiliation:
TU Delft, 3ME, MNE, Delft, Nederlands.
Ralu Divan
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
Anirudha V. Sumant
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
David Czaplewski
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
W. Merlijn van Spengen
Affiliation:
TU Delft, 3ME, MNE, Delft, Nederlands.
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Abstract

The excellent tribological performance of ultrananocrystalline diamond (UNCD) makes this material a potential candidate for the fabrication of long endurance micro/nano-electro-mechanical systems (MEMS/NEMS) that could involve contacting surfaces. In this work, UNCD and nitrogen incorporated UNCD (N-UNCD) microstructures have been produced and investigated, in order to analyze their intrinsic stress component. A solution for stress reduction is proposed: the application of a titanium stress-compensation coating seems to be an optimum route to obtain flat, free-standing N-UNCD films.

Keywords

diamondmicromelectro-mechanical (MEMS)tribology
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1478: Symposium S – Nanostructured Carbon Materials for MEMS/NEMS and Nanoelectronics , 2012 , imrc12-1478-s7d-109
Copyright
Copyright © Materials Research Society 2013 

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References

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