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Comparison of ZnS-based Buffer Layers by Chemical Bath Deposition and Atomic Layer Deposition

Published online by Cambridge University Press:  31 January 2011

Charlotte Platzer-Bjöerkman
Affiliation:
[email protected], Uppsala University, Solid State Electronics, Uppsala, Sweden
Alexander Uhl
Affiliation:
[email protected], Uppsala University, Solid State Electronics, Uppsala, Sweden
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Abstract

In this work we compare ZnS-based buffer layers prepared by atomic layer deposition, ALD, and chemical bath deposition, CBD. Both material and device properties are compared. CBD buffer layers are amorphous with a Zn(OH,S) composition while ALD buffer layers used in devices are crystalline with a Zn(O,OH,S) composition. Devices with ALD buffer layers are stable while for CBD, large lightsoaking effects are seen. Stable devices with CBD buffer layers are obtained by including an ALD-(Zn,Mg)O layer on top of the CBD layer.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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