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Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE

Published online by Cambridge University Press:  01 February 2011

Andreas Frank ,
J.-P. Zoellner ,
Y. Sarov ,
Tz. Ivanov ,
I. Kuhnholz ,
St. Klett ,
I. W. Rangelow ,
M. Swiatkowski ,
T. Gotszalk  and
N. Nikolov
Andreas Frank
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany, +49(0)367769-1590, +49(0)367769-3132
J.-P. Zoellner
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
Y. Sarov
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
Tz. Ivanov
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
I. Kuhnholz
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
St. Klett
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
I. W. Rangelow
Affiliation:
[email protected], TU-Ilmenau, Micro- and nanoelectronic systems, Gustav-Kirchoff-Str. 1, Ilmenau, 98693, Germany
M. Swiatkowski
Affiliation:
[email protected], Wroclaw Technical University, Wroclaw, 50372, Poland
T. Gotszalk
Affiliation:
[email protected], Wroclaw Technical University, Wroclaw, 50372, Poland
N. Nikolov
Affiliation:
[email protected], Microsystems Ltd., Varna, 9010 P.O. Box 147, Bulgaria
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Abstract

In this paper we present a novel method of nonlinear macro model of a cantilever for mixed domain simulation only with SPICE. Based on lumped elements of equivalent circuits a model is developed, which realizes a coupled electro-thermal-mechanical simulation including crosstalk effects. The model is verified with measurement and helps to class and solve crosstalk. With SPICE as electrical circuit simulator the cantilever array could be simulate in conjunction with the excitations and analysis electronics more detailed like the system level models and faster like FEM-simulation.

Keywords

microelectro-mechanical (MEMS)simulationmicroelectronics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1083: Symposium R – Coupled Mechanical, Electrical and Thermal Behaviors of Nanomaterials , 2008 , 1083-R02-08
Copyright
Copyright © Materials Research Society 2008

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References

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