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Combinatorial Fabrication and Study of Luminescent Nanocrystalline Si Particles Embedded in a SiO2 Matrix

Published online by Cambridge University Press:  26 February 2011

Luis F Fonseca ,
Oscar Resto ,
S. Zvi Weisz  and
Joseph Shinar
Luis F Fonseca
Affiliation:
[email protected]
Oscar Resto
Affiliation:
[email protected]
S. Zvi Weisz
Affiliation:
[email protected]
Joseph Shinar
Affiliation:
[email protected], United States
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Abstract

The combinatorial fabrication of nanocrystalline Si particles embedded in a SiO2 matrix (nc-Si:SiO2) by RF co-sputtering of Si and SiO2 targets is described. The peak of the photoluminescence (PL) spectra of the films varies systematically from 760 to 600 nm, consistent with the presumed systematic variation in the size distribution of the embedded Si particles. The correlation between the optical properties of the samples and the formation parameters is also analyzed.

Keywords

combinatorial synthesisSinanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 894: Symposium LL – Combinatorial Methods and Informatics in Materials Science , 2005 , 0894-LL06-08
Copyright
Copyright © Materials Research Society 2006

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References

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