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Collision Enhanced Decomposition of Microclusters Ablated from Si Surface by Excimer Laser Irradiation in Gas Environment

Published online by Cambridge University Press:  01 January 1992

A. Kasuya  and
Y. Nishina
A. Kasuya
Affiliation:
Institute for Materials Research, Tohoku University Sendai 980, Japan
Y. Nishina
Affiliation:
Institute for Materials Research, Tohoku University Sendai 980, Japan
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Abstract

Laser vaporization processes in Si are analyzed in vacuum and in inert gas environment by space/time resolved optical spectrometry. The results show significant increases in the intensity of luminescence emitted from laser-vaporized plume in gas pressures up to 5 Torr in Ar and 20 Torr in Xe. The intensity then decreases with further increase in the pressure. The observed results are interpreted that collisions of inert gas atoms with a vaporized Si cluster enhances its fragmentation leading to ejection of electronically excited Si atoms and ions. The decomposition process of highly charged clusters are discussed in terms of electrostatic Coulomb effect.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 111
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1.See for example, Physics and Chemistry of Small Clusters, edited by Jena, P., Rao, B.K. and Kanna, S.N. (NATO ASI Series B, 1987) Vol. 158.Google Scholar
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