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Characterization of Thin Films by Internal Friction Measurements

Published online by Cambridge University Press:  22 February 2011

H. G. Bohn  and
C. M. Su
H. G. Bohn
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich, Postfach 1913, 5170 Jülich 1, Germany
C. M. Su
Affiliation:
On leave of absence from Institute of Solid State Physics, Academia Sinica.
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Abstract

ABSTRACT: Internal friction has been employed to characterize various properties of thin Al and Al-alloy films. The grain boundary relaxation peak was used

a) to determine the activation energies for grain boundary diffusion in the alloy films,

b) to investigate the influence of impurities on the grain boundary diffusion in Al at concentration levels as low as 300 ppm, and

c) to get information about the adhesion strength between the film and the substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 215
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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