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Characterization of Spin -on Glasses by Microindentation.

Published online by Cambridge University Press:  10 February 2011

Eva E. Simonyi ,
K.-W. Lee ,
Robert F. Cook ,
Eric G. Liniger  and
James Speidell
Eva E. Simonyi
Affiliation:
IBM Research Yorktown Heights, Kamelesh Srivastava IBM E.Fishkill.
K.-W. Lee
Affiliation:
IBM Research Yorktown Heights, Kamelesh Srivastava IBM E.Fishkill.
Robert F. Cook
Affiliation:
IBM Research Yorktown Heights, Kamelesh Srivastava IBM E.Fishkill.
Eric G. Liniger
Affiliation:
IBM Research Yorktown Heights, Kamelesh Srivastava IBM E.Fishkill.
James Speidell
Affiliation:
IBM Research Yorktown Heights, Kamelesh Srivastava IBM E.Fishkill.
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Abstract

Spin-on glasses are candidates in the microelectronics industry as low dielectric constant insulating layers. Spin-on glasses are very brittle materials. This paper discusses measurement problems as relevant to the characterization of a brittle material by the indentation technique. As for all polymeric materials curing temperature is the most important preparation parameter. There is a correlation between hardness, Young's modulus, the onset of cracking with curing temperature. This dependence on curing temperature is also expressed by the change in Si-H bond density as shown by FTIR data. Life expectancy or aging characteristics were also investigated for these features. As an example results on silsesquioxane spin -on glasses are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 511: Symposium E – Low Dielectric Constant Materials IV , 1998 , 157
Copyright
Copyright © Materials Research Society 1998

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References

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