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Characterization of Pd/V Multilayer Structures by High-Angle Annular Dark-Field Microscopy and High Resolution Tem

Published online by Cambridge University Press:  25 February 2011

J. Liu ,
Y. Cheng ,
G. D. Lewen  and
M. B. Stearns
J. Liu
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
Y. Cheng
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
G. D. Lewen
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287 Now at NEC Research Institute, Princeton, NJ 08540
M. B. Stearns
Affiliation:
Now at NEC Research Institute, Princeton, NJ 08540
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Abstract

The structures of e-beam evaporated Pd/V multilayer thin films, which were fabricated at different substrate temperatures, have been characterized by high-angle annular dark-field microscopy and high resolution electron microscopy techniques. X-ray scattering and crosssectional electron microscopy showed that both the Pd and V layers are composed of small textured crystallites with dominant orientations of Pd (111) and V (110). It is found that Pd/V multilayers with high chemical modulation can be fabricated at substrate temperatures around 350 K and at a deposition rate of 0.2 nm/s. Here high-angle annular dark-field microscopy has been shown to provide direct information about the compositional variation of the interlayers of these ML.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 238: Symposium Cb – Structure and Properties of Interfaces in Materials , 1991 , 641
Copyright
Copyright © Materials Research Society 1992

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References

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