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Characterization of New SBT Sol System and its thin film on the Platinum Electrode for Fram Application

Published online by Cambridge University Press:  10 February 2011

YongSoo Choi ,
WooSik Kim ,
ChangEun Kim ,
WhanSik Yoo ,
BaeYeon Kim  and
HanSang Song
YongSoo Choi
Affiliation:
Department of Ceramic Engineering, YonSei University, Seoul, 120-749, Korea
WooSik Kim
Affiliation:
Department of Ceramic Engineering, YonSei University, Seoul, 120-749, Korea
ChangEun Kim
Affiliation:
Department of Ceramic Engineering, YonSei University, Seoul, 120-749, Korea
WhanSik Yoo
Affiliation:
Department of Material engineering, University of Inchon, Inchon, 402-749, Korea
BaeYeon Kim
Affiliation:
Department of Material engineering, University of Inchon, Inchon, 402-749, Korea
HanSang Song
Affiliation:
Semiconductor research division, Hyundai Electronics Industries Co., Ltd, Korea
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Abstract

Stable SBT sols for FRAM application were made from Sr-isopropoxide, Bi-acetate, and Ta-ethoxide with 2-ethoxyethanol as a solvent and chelating agent, TEA. The sol were spin-on coated on the Pt /Ti/SiO2/Si substrate. From the IR and DTA/TGA, the 2-ethoxyethanol -triethanolamine sol system is quite stable against aging. 5% excess Bi added sol and 800°C heat treatment of the thin film revealed the most crystallinity. There is a change in the orientation of thin film above 800°C heat treatment from c-axis to(105). The average grain size of thin film is very small, i.e., 40 nm at 800°C, and it has very narrow distributions, and the thickness of the coating were about 100nm, which would promise smaller electrode area and higher yield.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 231
Copyright
Copyright © Materials Research Society 1998

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References

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