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Characterization of Ion Beam Synthesized Materials Using Microscope-Spectrophotometry

Published online by Cambridge University Press:  22 February 2011

Rachel M. Geatches ,
Karen J. Reeson ,
Alan J. Criddle ,
Mark S. Finney ,
Milton A. Harry ,
Roger P. Webb  and
Peter J. Pearson
Rachel M. Geatches
Affiliation:
Department of Mineralogy, Natural History Museum, London, SW7 5BD, United Kingdom Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom
Karen J. Reeson
Affiliation:
Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom
Alan J. Criddle
Affiliation:
Department of Mineralogy, Natural History Museum, London, SW7 5BD, United Kingdom
Mark S. Finney
Affiliation:
Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom
Milton A. Harry
Affiliation:
Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom
Roger P. Webb
Affiliation:
Department of Electrical and Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom
Peter J. Pearson
Affiliation:
GEC-Marconi Materials Technology Ltd, Towcester, Northamptonshire, NN12 8EQ, United Kingdom
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Abstract

In this paper, the technique of microscope-spectrophotometry, used to nondestructively characterize the microstructure of ion beam synthesized iron-disilicide layers, is described. The results obtained agree extremely well, in terms of layer thickness and interfacial roughness, with those from Rutherford backscattering. The results also show that it is possible to interpret the measured spectral reflectance data in terms of: 1) defect annealing; 2) iron redistribution; and 3) phase transformations from the β to the α phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 813
Copyright
Copyright © Materials Research Society 1994

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References

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