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Characterization of InP/GaInAs Nanometer Sized Columns Produced by Aerosol Deposition and Plasma Etching

Published online by Cambridge University Press:  21 February 2011

I. Maximov ,
K. Deppert ,
L. Montelius ,
L. Samuelson ,
S. Gray ,
M. Johansson ,
H.-C. Hansson  and
A. Wiedensohler
I. Maximov
Affiliation:
Department of Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
K. Deppert
Affiliation:
Department of Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
L. Montelius
Affiliation:
Department of Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
L. Samuelson
Affiliation:
Department of Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
S. Gray
Affiliation:
Department of Synchrotron Radiation Research, Lund University, Box 118, S-221 00 Lund, Sweden
M. Johansson
Affiliation:
Department of Synchrotron Radiation Research, Lund University, Box 118, S-221 00 Lund, Sweden
H.-C. Hansson
Affiliation:
Department of Nuclear Physics, Lund University, Sö1vegatan 14, S-223 62 Lund, Sweden
A. Wiedensohler
Affiliation:
Department of Nuclear Physics, Lund University, Sö1vegatan 14, S-223 62 Lund, Sweden
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Abstract

We present a technique for the fabrication of InP nano-columns and GaInAs/InP quantum-dots based on the use of sintered aerosol Ag particles as a mask in an electron cyclotron resonance etching process. The sintered particles have much more regular shapes than the unsintered ones used in previous studies and are more resistant to the etching environment, which results in the formation of more regular and reproducible structures. For example, we have been able to produce columns 100 nm in height which have an average diameter of 24 nm and a density of 109 cm−2.We have investigated the shape of the etched columns as a function of the Ag particles’ size, and characterized their electrical and optical properties using a combination of scanning electron microscopy, scanning tunneling microscopy, atomic force microscopy, and photoluminescence.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 513
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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