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Characterisation of Ferroelectric Lithium Tantalate Thin FilmsPrepared by a Sol-Gel Process
Published online by Cambridge University Press: 15 February 2011
Abstract
Thin LiTaO3 films were prepared by spin coating of polymerizedsol-gel precursor solution. Films have been deposited on single crystalsilicon substrate, Ti/Pt or SiO2 coated silicon substrate. Filmswere characterized by x-ray diffraction, dielectric and pyroelectricMeasurements. High Curie temperature (above 550 °C) was assumed for LiTaO3 thin films from the temperature dependence ofdielectric constant. Replacing 35% of tantalum by titanium atoms in the LiTaO3 precursor solution has resulted the thin films withCurie temperature of 330 °C. The lower Curie temperature leads to the largerpyroelectric coefficient at room-temperature, which is more than double thatof the undoped LiTaO3 thin films. The dielectric, pyroelectric,and ferroelectric properties have been compared to the single crystal LiTaO3 and ceramic Li0.91Ta0.73Ti0.36O3. LiTaO3 thin films are available by sol-gel process at lowtemperature, and their properties may possibly be controlled by varying thecomposition of the sol-gel precursor solution.
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- Copyright © Materials Research Society 1994
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