Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-25T15:53:08.806Z Has data issue: false hasContentIssue false

Changing Segregation Coefficients During Ion Beam Induced Epitaxy of Amorphous Si

Published online by Cambridge University Press:  26 February 2011

J. S. Custer
Affiliation:
Dept. of Materials Science and Engineering, Cornell University, Ithaca, NY 14853 Now at: FOM Institute for Atomic and Molecular Physics, 1098 SJ Amsterdam, the Netherlands
Michael O. Thompson
Affiliation:
Dept. of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
D. C. Jacobson
Affiliation:
IAT&T Bell Laboratories, Murray Hill, NJ 07974
J. M. Poate
Affiliation:
IAT&T Bell Laboratories, Murray Hill, NJ 07974
Get access

Abstract

Ion beam induced epitaxial crystallization of Au and Ag doped amorphous Si results in segregation and trapping of the impurity. Combining the measured interface velocity and impurity profiles in segregation simulations provides a measure of the segregation coefficient k during growth. To adequately match the experimental profiles, k must increase during the early stage of growth until saturating at a temperature dependent value. This segregation process cannot be explained within standard models where k depends on the inteface velocity (kinetic trapping) or the interface impurity concentration (thermodynamic solubility). Instead the data suggests that the number of trapping sites at the interface increases during the initial stages of ion beam induced growth. We present several possible mechanisms for this trapping increase and discuss their significance in ion beam and thermal epitaxy models.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Csepregi, L., Mayer, J. W., and Sigmon, T. W., Physics Letters 54A, 157 (1975).Google Scholar
2 Olson, G. L. and Roth, J. A., Materials Science Reports 3, 1 (1988).Google Scholar
3 Csepregi, L., Kennedy, E. F., Mayer, J. W., and Sigmon, T. W., J. Appl. Phys. 49, 3906 (1978).CrossRefGoogle Scholar
4 Lu, G. Q., Nygren, E., Aziz, M. J., Turnbull, D., and White, C. W., Appl. Phys. Lett. 54, 2583 (1989).CrossRefGoogle Scholar
5 Csepregi, L., Kennedy, E. F., Gallagher, T. E., Mayer, J. W., and Sigmon, T. W., J. Appl. Phys. 48, 4234 (1977).CrossRefGoogle Scholar
6 Ho, K. T., Suni, I., and Nicolet, M-A., J. Appl. Phys. 56, 1207 (1984).Google Scholar
7 Jacobson, D. C., Poate, J. M., and Olson, G. L., Appl. Phys. Lett. 40, 118 (1986).Google Scholar
8 Custer, J. S., Thompson, Michael O., Eaglesham, D. J., Jacobson, D. C., and Poate, J. M., unpublished.Google Scholar
9 Thornton, R. P., Elliman, R. G., and Williams, J. S., J. Mater. Res. 5, 1003 (1990).Google Scholar
10 Kennedy, E. F., Csepregi, L., Mayer, J. W., and Sigmon, T. W., J. Appl. Phys. 48, 4241 (1977).CrossRefGoogle Scholar
11 Holmén, G. and Hogberg, P., Radiat. Eff. 12, 77 (1972).Google Scholar
12 Golecki, I., Chapman, G. E., Lau, S. S., Tsaur, B. Y., and Mayer, J. W., Physics Letters 71A, 267 (1979).Google Scholar
13 Linnros, J., Holmén, G., and Svensson, B., Phys. Rev. B 32, 2270 (1985).Google Scholar
14 Maher, D. M., Elliman, R. G., Linnros, J., Williams, J. S., Knoell, R. V., and Brown, W. L., Mat. Res. Soc. Symp. Proc. 93, 87 (1987).CrossRefGoogle Scholar
15 Ferla, A. La, Cannavò, S., Ferla, G., Campisano, S. U., Rimini, E., and Servidori, M., Nucl. Instr. and Meth. B19/20, 470 (1987).Google Scholar
16 Priolo, F., Spinella, C., Ferla, A. La, Rimini, E., and Ferla, G., Appl. Surf. Sci. 43, 178 (1989).CrossRefGoogle Scholar
17 Custer, J. S., Thompson, Michael O., Jacobson, D. C., and Poate, J. M., Mat. Res. Soc. Symp. Proc. 157, 113 (1990).CrossRefGoogle Scholar
18 Custer, J. S., Thompson, Michael O., Jacobson, D. C., and Poate, J. M., unpublished, Custer, J. S., PhD thesis, Cornell University, 1990.Google Scholar
19 Williams, J. S., Elliman, R. G., Brown, W. L., and Seidel, T. E., Phys. Rev. Lett. 55, 1482 (1985), J. Linnros and G. Holmin, J. Appl. Phys. 59, 1513 (1986).Google Scholar
20 Elliman, R. G., Jacobson, D. C., Linnros, J., and Poate, J. M., Appl. Phys. Lett. 51, 314 (1987).Google Scholar
21 Poate, J. M., Linnros, J., Priolo, F., Jacobson, D. C., Batstone, J. L., and Thompson, Michael O., Phys. Rev. Lett. 60, 1322 (1988).Google Scholar
22 Poate, J. M., Jacobson, D. C., Priolo, F., and Thompson, Michael O., Mat. Res. Soc. Symp. Proc. 128, 533 (1989).Google Scholar
23 Priolo, F., Ferla, A. La, and Rimini, E., J. Mater. Res. 3, 1212 (1988).CrossRefGoogle Scholar
24 Poate, J. M., Jacobson, D. C., Williams, J. S., Elliman, R. G., and Boerma, D. O., Nucl. Instr. and Meth. B19/20, 480 (1987), F. Priolo, J. M. Poate, D. C. Jacobson, J. Linnros, J. L. Batstone, and S. U. Campisano, Appl. Phys. Lett. 52, 1213 (1988), F. Priolo, PhD thesis, Universita' degli Studi di Catania, 1989.CrossRefGoogle Scholar
25 Priolo, F., Batstone, J. L., Poate, J. M., Linnros, J., Jacobson, D. C., and Thompson, Michael O., Appl. Phys. Lett. 52, 1043 (1988).Google Scholar
26 Aziz, M. J., Tsao, J. Y., Thompson, Michael O., Peercy, P. S., White, C. W., Phys. Rev. Lett. 56, 2489 (1986).CrossRefGoogle Scholar
27 Spaepen, F., Acta. Met. 23, 729 (1975), F. Spaepen, Acta. Met. 28, 1167 (1978).Google Scholar
28 Williams, J. S. and Elliman, R. G., Phys. Rev. Lett. 51, 1069 (1983).Google Scholar
29 Priolo, F., Spinella, C., and Rimini, E., Phys. Rev. B 41, 5235 (1990).CrossRefGoogle Scholar
30 Jackson, K. A., J. Mater. Res. 3, 1218 (1988).Google Scholar
31 Aspnes, D. E. and Ihm, J., Phys. Rev. Lett. 57, 3054 (1986).Google Scholar
32 Alerhand, O. L., Vanderbilt, D., Meade, R. D., and Joannopoulos, J. D., Phys. Rev. Lett. 61, 1973 (1988), D. Vanderbilt, O. L. Alerhand, R. D. Meade, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 7, 1013 (1989), and T. W. Poon, S. Yip, P. S. Ho, and F. F. Abraham, Phys. Rev. Lett. 65, 2161 (1990).Google Scholar
33 Ampo, H., Miura, S., Kato, K., Ohkawa, Y., and Tamura, A., Phys. Rev. B 34, 2329 (1986).Google Scholar
34 Robinson, I. K., Waskiewicz, W. K., Tung, R. T., and Bohr, J., Phys. Rev. Lett. 57, 2714 (1986).Google Scholar