Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-25T15:29:56.005Z Has data issue: false hasContentIssue false
  • English
  • Français

Cathodoluminescence Microanalysis of Electron Irradiation Damage in Wide Band Gap Materials

Published online by Cambridge University Press:  15 February 2011

M.A. stevens Kalceff ,
M.R. Phillips ,
M. Toth ,
A.R. Moon ,
D.N. Jamieson ,
J.O. Orwa  and
S. Prawer
M.A. stevens Kalceff
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA, [email protected]
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
M. Toth
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
A.R. Moon
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, PO 123, Broadway NSW 2007, AUSTRALIA
D.N. Jamieson
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
J.O. Orwa
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
S. Prawer
Affiliation:
School of Physics, University of Melbourne, Microanalytical Research Centre, Parkville, Vic. 3052, AUSTRALIA
Get access

Abstract

Cathodoluminescence (CL) microanalysis (spectroscopy and microscopy) in an electron microscope enables both pre-existing and irradiation induced local variations in the bulk and surface defect structure of wide band gap materials to be characterized with high spatial (lateral and depth) resolution and sensitivity. CL microanalytical techniques allow the in situ monitoring of electron irradiation induced damage, the post irradiation assessment of damage induced by other energetic radiation, and the investigation of irradiation induced electromigration of mobile charged defect species. Electron irradiated silicon dioxide polymorphs and MeV H+ ion implanted Type Ila diamond have been investigated using CL microanalytical techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 540: Symposium N / Microstructural Processes in Irradiated Materials , 1998 , 43
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Yacobi, B. and Holt, D., Cathodoluminescence Microscopy of Inorganic Solids.(Plenum Press, New York, 1990).Google Scholar
2. Steeds, J., in Encyclopedia of Applied Physics V3, edited by Trigg, G. 121 (VCH, New York, 1992)Google Scholar
3. Kalceff, M.A. Stevens and Phillips, M. R., Physical Review B. 52, 3122 (1995).Google Scholar
4. Kalceff, M.A. Stevens, Physical Review B. 57, 5674–5683 (1998).Google Scholar
5. Silica; Vol. 29, edited by Heaney, P.J., Prewitt, C.T., and Gibbs, G.V. (Mineralogical Society of America, Washington DC, 1994).Google Scholar
6. Griscom, D.L., Jour. Cer.Soc.Japan 99, 923 (1991).Google Scholar
7. Griscom, D.L., Reviews of Solid State Science 4, 565 (1990).Google Scholar
8. Palma, A., Lopez-Villanueva, J.A., and Carceller, J.E., J.Electrochem.Soc. 143, 2687 (1996).Google Scholar
9. Macpherson, A.N., Truscott, T.G., and Turner, P.H., J.Chem.Soc. Faraday Transactions 90, 1065–1072 (1994).Google Scholar
10. Wessels, J.M. and Rodgers, M.A.J., Journal of Physical Chemistry 99, 17586–17592 (1995).Google Scholar
11. Habuchi, H., Itoh, T., Nitta, S. and Nonomura, S., Appl. Surface Science 114, 286–290 (1997).Google Scholar
12. Nissen, M.K., Wilson, S.M., and Thewalt, M.L.W., Phys.Rev.Lett. 69, 2423–2426 (1992).Google Scholar
13. Howells, S.C., Black, G., and Schlie, L. A., Synthetic Metals 62, 1–7 (1994).Google Scholar
14. Cazaux, J., Journal of Applied Physics. 59, 1418 (1986).Google Scholar
15. Kalceff, M.A. Stevens and Phillips, M.R., J.Appl.Phys. 77, 4125–4127 (1995).Google Scholar
16. Kalceff, M.A. Stevens, Phillips, M.R., and Moon, A.R., J.Appl.Phys. 80, 4308 (1996).Google Scholar
17. Hovington, P., Drouin, D., and Gauvin, R., Scanning 19, 1–14 (1997).Google Scholar
18. Jamieson, D.N., Prawer, S., Nugent, K.W., and Dooley, S.P., Nuclear Instruments and Methods in Physics Research B 106, 641–645 (1995).Google Scholar
19. Prins, J.F., in The Properties of Natural and Synthetic Diamond, edited by Field, J.E. (Academic Press, London, 1992).Google Scholar
20. Clark, C.D., Collins, A.T., and Wood, G.S., in reference 19, p. 35–79.Google Scholar
21. Prins, J.F., Diamond and Related Minerals 3, 922–925 (1994).Google Scholar
22. Sellschop, J.P.F., in reference 19, p 81–179.Google Scholar