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Catalytic Decomposition of Perfluorocompounds

Published online by Cambridge University Press:  10 February 2011

S. Kanno ,
S. Ikeda ,
H. Yamashita ,
S. Azuhata ,
S. Irie  and
S. Tamata
S. Kanno
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7–1–1 Omika-cho, Hitachi-shi Ibaraki-ken 319–12, Japan
S. Ikeda
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7–1–1 Omika-cho, Hitachi-shi Ibaraki-ken 319–12, Japan
H. Yamashita
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7–1–1 Omika-cho, Hitachi-shi Ibaraki-ken 319–12, Japan
S. Azuhata
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7–1–1 Omika-cho, Hitachi-shi Ibaraki-ken 319–12, Japan
S. Irie
Affiliation:
Hitachi works, Hitachi, Ltd., 3–1–1 Saiwai-cho, Hitachi-shi Ibaraki-ken 317, Japan
S. Tamata
Affiliation:
Hitachi works, Hitachi, Ltd., 3–1–1 Saiwai-cho, Hitachi-shi Ibaraki-ken 317, Japan
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Abstract

It is becoming increasingly important to decompose PFCs (Perfluorocompounds), which are powerful greenhouse gases. The process of catalytic decomposition is expected to be effective in operating at lower temperatures if catalysts of high activity and durability are developed. The decomposition activities of PFC with H2O was investigated using several catalysts. It was found that PFC decomposition activity was related to the reactivity of fluorine and the formation of mixed oxides. Using the catalyst we have developed, CF4 was decomposed with conversion above 99.9% over 1988h. Furthermore, another PFC was decomposed over the catalyst. The order of the conversion was CHF3 > CF4 > C2F6. The catalytic decomposition system can use the treatment of PFCs in dry etch process waste gas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 497: Symposium Z – Recent Advances in Catalytic Materials , 1997 , 59
Copyright
Copyright © Materials Research Society 1998

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References

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