Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-25T17:28:02.176Z Has data issue: false hasContentIssue false

A Cascaded Microwave Plasma Source for Synthesis of Ceramic Nanocomposite Powders

Published online by Cambridge University Press:  15 February 2011

Dieter Vollath*
Affiliation:
Kernforschungszentrum Karlsruhe, Institut für Materialforschung III, P. O. Box 3640, D-76021 Karlsruhe, Germany
Get access

Abstract

Based on the experience of the synthesis of nanophased ceramic powders with particle size in the range of a few nanometers, a new device for the synthesis of ceramic nanocomposite powders was designed. The new equipment is based on a 915 MHz microwave system built of IEC 153 R9 waveguide elements. The microwaves coming from the magnetron are split up in two branches using an E-plane power splitter. The reaction tube, made of quartz, passes consecutively both branches of the wave-guide system. Behind the applicators with the reaction tube, the waveguides are terminated with sliding shorts. These sliding shorts are adjusted in a way to ignite and operate a plasma in both branches of the waveguide system simultaneously. The system allows the production of homogeneous powders for nanocomposites. “Nanocoated particles” can be obtained in some special cases;for example ZrO2 particles synthesized with sizes in the range between 4 and 5 nm can be coated with a 1 to 2 nm layer of Al2O3 or vice versa. Metal chlorides are selected as precursors for the reactions. A mixture of, argon with 20 vol% oxygen is used as a plasma gas.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Gleiter, H., Prog. in Mat. Science 33, 223 (1989).Google Scholar
2. Karen, J., Birringer, R., Gleiter, H. Nature 330, 556 (1987).Google Scholar
3. Hahn, H., Eastman, J. A., Siegel, R. W., Ceramic Transactions B1, 1115 (1988).Google Scholar
4. Vollath, D., Sickafus, K. E., Nanostructured Materials 1, 427 (1992).Google Scholar
5. Vollath, D., Sickafus, K. E., J. Mater. Res. 8, 2978 (1993).Google Scholar
6. Vollath, D., KfK-Nachrichten 25, 139 (1993).Google Scholar
7. McDonald, A. D., Microwave Breakdown in Gases, (John Wiley & Sons, 1966).Google Scholar