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Carrier Mobility and Active Layer Sheet Measurements of Compound Semiconductors

Published online by Cambridge University Press:  26 February 2011

David Denenberg  and
Austin Blew
David Denenberg
Affiliation:
Lehighton Electronics Inc., P. O. Box 328, Lehighton, PA 18235
Austin Blew
Affiliation:
Lehighton Electronics Inc., P. O. Box 328, Lehighton, PA 18235
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Abstract

This paper describes a compact production line microwave (approx. 10 GHZ) active layer sheet resistivity carrier mobility measurement instrument based on the invention from IBM Watson Labs by Dr. Norman Bras lau. [1]

The Measurement techniques and compound semiconductor wafer measurements will be described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 240: Symposium E – Advanced III-V Compound Semiconductor Growth, Processing and Devices , 1991 , 225
Copyright
Copyright © Materials Research Society 1992

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References

[1] Braslau, N., Patent No. 4, 605, 893, Aug 12, 1986 Google Scholar
[2] Braslau, N., Inst. Phys. Conf Ser. 74, 269 (1984)Google Scholar
[3] Jantz, W., Frey, Th., and Bachem, K. H., Fraunhofer Inst., Nov 1987 Google Scholar
[4] Rees, H. D., J. Phys., C 3, 965, (1970)Google Scholar
[5] Boardman, A. D., Fawcett, W., and Ruch, J. G., Phys. Stat. Sol. A, 4, 133, (1971)CrossRefGoogle Scholar
[6] Look, D. C., IEEE Elect. Dev. Lett., Vol 8, No. 4, Apr (1987)CrossRefGoogle Scholar