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Carbon, Nitrogen, and Oxygen Ion Implantation of Stainless Steel

Published online by Cambridge University Press:  21 February 2011

D.J. Rej ,
N.V. Gavrilov ,
D. Emlin ,
I. Henins ,
K. Kern ,
T. Kurennykh ,
V.N. Mizgulin ,
C.P. Munson ,
M. Nastasi  and
J.T. Scheuer
...Show all authors
D.J. Rej
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
N.V. Gavrilov
Affiliation:
Inst. of Electrophysics, 34 Komsomolskaya St., Ekaterinburg 620049 Russia, [email protected]
D. Emlin
Affiliation:
Inst. of Electrophysics, 34 Komsomolskaya St., Ekaterinburg 620049 Russia, [email protected]
I. Henins
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
K. Kern
Affiliation:
Center for Materials Research, Norfolk State Univ., Norfolk, VA 23401
T. Kurennykh
Affiliation:
Inst. of Metal Physics, 18 Kovalevskaya St., Ekaterinburg 620219, Russia
V.N. Mizgulin
Affiliation:
Inst. of Electrophysics, 34 Komsomolskaya St., Ekaterinburg 620049 Russia, [email protected]
C.P. Munson
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
M. Nastasi
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
J.T. Scheuer
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
V. Vykhodets
Affiliation:
Inst. of Metal Physics, 18 Kovalevskaya St., Ekaterinburg 620219, Russia
K. C. Walter
Affiliation:
Los Alamos National Laboratory, MS-D434, Los Alamos, NM 87545, [email protected]
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Abstract

Ion implantation experiments of C, N and O into stainless steel have been performed with beam-line and plasma source ion implantation methods. Acceleration voltages are varied between 27 and 50 kV, with pulsed ion current densities between 1 and 10 mA/cm2. Implanted doses range from 0.5 to 3×1018cm-2, while workpiece temperatures are maintained between 25 and 800°C. The implant concentration profiles, microstructure and surface mechanical properties of the implanted materials are reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 661
Copyright
Copyright © Materials Research Society 1996

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